| Integrated hardware | Roughing valve Purge valve Cryopump TC gauge 1st stage diode 2nd stage diode 1st stage heater 2nd stage heater RS-232 interface |
| Pumping speeds | |
| H2O | 4,000 liters/sec |
| N2 | 1,500 liters/sec |
| H2 | 2,200 liters/sec |
| Ar | 1,200 liters/sec |
| Ar throughput at 20K* | 250 - 700 sccm (Torr-liters/sec) |
| Capacities | |
| Ar | 1,000 std. liters @ 5 x 10-6 Torr 750 std. liters @ 5 x 10-7 Torr (recovery in 30 seconds) |
| H2 | 12 std. liters @ 5 x 10-6 Torr |
| N2 | 550 std. liters (recovery to 5 x 10-7 Torr in 30 seconds) |
| Crossover | 150 Torr-liters |
| Full regeneration - cold to cold (with 1 minute extended purge) | ≤ 90 minutes (1 pump / 1 compressor) ≤ 120 minutes (5 pumps / 1 compressor) |
| Fast regeneration | ≤ 35 minutes (1 pump / 1 compressor) ≤ 60 minutes (5 pumps / 1 compressor) |
| Weight | 67 lbs |
*Depends upon system configuration
This product has been refurbished by PTB Sales
경기도 화성시 양감면 정문송산로 206-4(송산리516) #18628