| Model | On-Board IS 320F | On-Board IS 320FE | |
|---|---|---|---|
| Integrated hardware | Roughing valve Purge valve Cryopump TC gauge 1st stage diode 2nd stage diode 1st stage heater 2nd stage heater RS-232 interface | ||
| Pumping speeds | H2O | 11,000 liters/sec | 11,000 liters/sec |
| N2 | 3,300 liters/sec | 3,600 liters/sec | |
| H2 | 9,000 liters/sec | 12,500 liters/sec | |
| Ar | 2,700 liters/sec | 3,000 liters/sec | |
| Capacities | H2 | 30 std. liters @ 5 x 10-6 Torr | |
| Crossover | 300 Torr-liters | ||
| Full Regeneration - cold to cold (with 20 minutes extended purge) | ≤ 150 minutes (1 pump / 1 compressor) ≤ 150 minutes (3 pumps / 1 compressor) with TI = 100K | ||
| Fast regeneration | ≤ 75 minutes (1 pump / 1 compressor) ≤ 75 minutes (3 pumps / 1 compressor) with TI = 100K | ||
| Weight | 100 lbs | ||
This product has been refurbished by PTB Sale
경기도 화성시 양감면 정문송산로 206-4(송산리516) #18628