| Rough pump connection | NW 25 ISO KF |
| Integrated hardware | 2nd stage diode |
| Pumping speeds: Water Air H2 Ar | 30,000 liters/sec 10,000 liters/sec 10,000 liters/sec 8,400 liters/sec |
| Ar throughput | 500 sccm (6 Torr-liters/sec) |
| Capacity: Ar H2 | 3,000 std. liters 16 std. liters @ 5 x 10-6 Torr |
| Crossover | 500 Torr-liters |
| Cooldown time 60 Hz 50 Hz | 180 minutes 220 minutes |
| Weight | 205 lbs. (93 kg) |
경기도 화성시 양감면 정문송산로 206-4(송산리516) #18628